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Structural characterization of mixed Ta-Re oxide films (Articolo in rivista)
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- Structural characterization of mixed Ta-Re oxide films (Articolo in rivista) (literal)
- Anno
- 2006-01-01T00:00:00+01:00 (literal)
- Alternative label
Purans, J; Kuzmin, A; Kalendarev, R; Cazzanelli, E; Castriota, M (2006)
Structural characterization of mixed Ta-Re oxide films
in Solid state ionics (Print)
(literal)
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- Purans, J; Kuzmin, A; Kalendarev, R; Cazzanelli, E; Castriota, M (literal)
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- Univ Trent, Dept Phys, I-38050 Povo, Trento, Italy; Latvian State Univ, Inst Solid State Phys, LV-1063 Riga, Latvia; Univ Calabria, Dept Phys, LICRYL, Ctr CNR, I-87037 Arcavacata Di Rende, Cosenza, Italy (literal)
- Titolo
- Structural characterization of mixed Ta-Re oxide films (literal)
- Abstract
- Thin films of mixed Ta and Re oxides have been produced by reactive dc magnetron co-sputtering of pure Ta and Re metal targets in Ar-O-2 atmosphere. The structural evolution of these films has been studied as a function of the composition, starting from a pure tantalum oxide film up to about 82% rhenium content. The composition and the structure of the films have been investigated by using X-ray diffraction and micro-Raman spectroscopy. For low Re content (20%), islands of a well crystallized phase, based on ReO4 groups, appear in the films still composed by pure amorphous tantalum oxide, while a mixed disordered solid phase is found for the highest Re concentration (82%). (c) 2006 Elsevier B.V. All rights reserved. (literal)
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