Analysis of the Actuation of an RF-MEMS by Means of Digital Holography (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Analysis of the Actuation of an RF-MEMS by Means of Digital Holography (Articolo in rivista) (literal)

Anno

• 2009-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1166/jhs.2009.1012 (literal)

Alternative label

• Coppola, Giuseppe; Striano, Valerio; De Nicola, Sergio; Finizio, Andrea; Ferraro, Pietro (2009)
  Analysis of the Actuation of an RF-MEMS by Means of Digital Holography
  in Journal of holography and speckle
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Coppola, Giuseppe; Striano, Valerio; De Nicola, Sergio; Finizio, Andrea; Ferraro, Pietro (literal)

Pagina inizio

• 175 (literal)

Pagina fine

• 179 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://dx.doi.org/10.1166/jhs.2009.1012 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 5 (literal)

Rivista

• Journal of holography and speckle (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 2 (literal)

Note

• Research gate (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR (literal)

Titolo

• Analysis of the Actuation of an RF-MEMS by Means of Digital Holography (literal)

Abstract

• Digital holography is employed as non-contact metrological tool for inspection and characterization of a micromechanical shunt switch for microwave applications. The switch is based on a bridge that is actuated via an electrostatic force generated by a DC voltage signal applied between the bridge and the underneath region. The out-of-plane deformation of the bridge has been investigated during the operational conditions in order to measure the warp in the bridge occurring during its actuation. The results reported in this paper are obtained biasing the RF-MEMS with a voltage ramp with a period of 1s and an amplitude of 30 V. Digital Holography allowed to diagnostic and measure an asymmetric deformation of the device during its actuation. (literal)

Prodotto di

• Sviluppo di tecniche di diagnostica ottica, microscopia ed interferometria (MD.P03.022.001) (Modulo)
• Istituto di cibernetica \"Edoardo Caianiello\" (ISASI) (Istituto)

Autore CNR

• ANDREA FINIZIO (Unità di personale interno)
• SERGIO DE NICOLA (Persona)
• PIETRO FERRARO (Unità di personale interno)
• GIUSEPPE COPPOLA (Persona)
• VALERIO STRIANO (Persona)

Insieme di parole chiave

• Keywords of "Analysis of the Actuation of an RF-MEMS by Means of Digital Holography" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• PIETRO FERRARO (Unità di personale interno)
• SERGIO DE NICOLA (Persona)
• ANDREA FINIZIO (Unità di personale interno)
• VALERIO STRIANO (Persona)
• GIUSEPPE COPPOLA (Persona)

Prodotto

• Istituto di cibernetica \"Edoardo Caianiello\" (ISASI) (Istituto)
• Sviluppo di tecniche di diagnostica ottica, microscopia ed interferometria (MD.P03.022.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Journal of holography and speckle (Rivista)

Insieme di parole chiave di

• Keywords of "Analysis of the Actuation of an RF-MEMS by Means of Digital Holography" (Insieme di parole chiave)