Fiber texturing in nano-crystalline TiO2 thin films deposited at 150 degrees C by dc-reactive sputtering on fiber-textured [0001] ZnO:Al substrates (Articolo in rivista)

Type
Label
  • Fiber texturing in nano-crystalline TiO2 thin films deposited at 150 degrees C by dc-reactive sputtering on fiber-textured [0001] ZnO:Al substrates (Articolo in rivista) (literal)
Anno
  • 2012-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1088/0022-3727/45/35/355301 (literal)
Alternative label
  • Pellegrino G, Bongiorno C, Ravesi S, Alberti A (2012)
    Fiber texturing in nano-crystalline TiO2 thin films deposited at 150 degrees C by dc-reactive sputtering on fiber-textured [0001] ZnO:Al substrates
    in Journal of physics. D, Applied physics (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Pellegrino G, Bongiorno C, Ravesi S, Alberti A (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 45 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 35 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • [ 1 ] CNR IMM Zona Ind, I-95121 Catania, Italy [ 2 ] STMicroelectronics, I-95121 Catania, Italy (literal)
Titolo
  • Fiber texturing in nano-crystalline TiO2 thin films deposited at 150 degrees C by dc-reactive sputtering on fiber-textured [0001] ZnO:Al substrates (literal)
Abstract
  • TiO2 thin films were deposited at an effective surface temperature of 150 degrees C by dc-reactive magnetron sputtering on ZnO : Al oriented substrates having a fiber texture along the [0 0 0 1] axis, and studied by transmission electron microscopy and x-ray diffraction analyses. The substrate texturing was used to tailor the TiO2 structure in such a way that a porous matrix made of anatase nano-grains (10 nm in diameter) is formed instead of an amorphous layer (as observed at 150 degrees C on glass). Additionally, we demonstrate that, by adding an ex situ 200 degrees C annealing, the anatase domains also gain a fiber texture with the axes aligned to that of the substrate. The TiO2/AZO structural coupling is expected to play a crucial role for the carrier transport through the interface as required in dye-sensitized solar cells. Moreover, the low temperatures used render the process compatible with commonly used plastics substrates. (literal)
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