Fabrication of SiGe rings and holes on Si(0 0 1) by flash annealing (Articolo in rivista)

Type
Label
  • Fabrication of SiGe rings and holes on Si(0 0 1) by flash annealing (Articolo in rivista) (literal)
Anno
  • 2013-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.apsusc.2013.07.024 (literal)
Alternative label
  • L. Persichetti, A. Capasso, A. Sgarlata, A. Quatela, S. Kaciulis, A. Mezzi, M. Notarianni, N. Motta, M. Fanfoni, A. Balzarotti. (2013)
    Fabrication of SiGe rings and holes on Si(0 0 1) by flash annealing
    in Applied surface science
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • L. Persichetti, A. Capasso, A. Sgarlata, A. Quatela, S. Kaciulis, A. Mezzi, M. Notarianni, N. Motta, M. Fanfoni, A. Balzarotti. (literal)
Pagina inizio
  • 813 (literal)
Pagina fine
  • 819 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 283 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Univ Roma Tor Vergata, Dipartimento Fis, I-00133 Rome, Italy. Univ Roma Tor Vergata, Dipartimento Ingn Elettron, CHOSE, I-00133 Rome, Italy. Queensland Univ Technol, Sch Chem Phys & Mech Engn, Brisbane, Qld 4001, Australia. CNR, ISMN, I-00015 Rome, Italy. (literal)
Titolo
  • Fabrication of SiGe rings and holes on Si(0 0 1) by flash annealing (literal)
Abstract
  • We show that SiGe islands are transformed into nanoholes and rings solely by annealing treatments and without Si capping. Rings are produced by a rapid flash heating at temperatures higher than the melting point of Ge, whereas nanoholes are produced by several minutes of annealing. The rings are markedly rich in Si with respect to the pristine islands, suggesting that the evolution path from islands to rings is driven by the selective dissolution of Ge occurring at high temperatures. (literal)
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