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Process - Induced inhomogeneities in higher asymmetry angle X-ray monochromators (Articolo in rivista)

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Process - Induced inhomogeneities in higher asymmetry angle X-ray monochromators (Articolo in rivista) (literal)

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Korytár, Dusan; Vagovic, Patrik; Ferrari, Claudio; Shiffalovic, Peter; Jergel, Matej; Dobrocka, Edmund; Záprazný, Zdenko; Ác, Vladimír; Mikulík, Petr (2013)
Process - Induced inhomogeneities in higher asymmetry angle X-ray monochromators
in Proceedings of SPIE, the International Society for Optical Engineering; SPIE-INT SOC OPTICAL ENGINEERING, BELLINGHAM, WA 98227-0010 (Stati Uniti d'America)
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Korytár, Dusan; Vagovic, Patrik; Ferrari, Claudio; Shiffalovic, Peter; Jergel, Matej; Dobrocka, Edmund; Záprazný, Zdenko; Ác, Vladimír; Mikulík, Petr (literal)

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Institute of Electrical Engineering Slovak Academy of Sciences; Tohoku University; Consiglio Nazionale delle Ricerche; Institute of Physics Slovak Academy of Sciences; A. Dub?ek University of Tren?ín; Masaryk University (literal)

Titolo

Process - Induced inhomogeneities in higher asymmetry angle X-ray monochromators (literal)

Abstract

Beam inhomogeneities of asymmetric Ge(220)-based V-shaped and single bounce monochromators have been studied both in metrological and imaging applications for photon energies around 8 keV. Presence of growth striations in graded GeSi, grains in single Cu crystal, and strains in thermally tuned V-channel monochromators observed in X-ray topographs excludes these materials from imaging applications. As for stochastic surface processing, chemomechanical polishing (CMP) produces better surface homogeneity than chemical polish. However, CMP is more difficult to be applied in V-channels, where chemical polishing is prefered. For comparison, measurements on surfaces processed by a deterministic mechanical method of single point diamond turning (SPDT) have shown SPDT to be a perspective technology. Again, to prepare deep grooves with this technique is also a challenge, mainly for tool makers. Some process induced features are observed as wavefield distortions in interference fringes. © 2013 SPIE. (literal)

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