Sviluppo di materiali e dispositivi avanzati per la nanoelettronica (DFM.AD003.289)

Area tematica

Scienze fisiche e tecnologie della materia

Area progettuale

Struttura responsabile del progetto di ricerca

Istituto per la microelettronica e microsistemi (IMM)

Responsabile di progetto

GRAZIELLA TALLARIDA
Telefono: 0396035977
E-mail: grazia.tallarida@mdm.imm.cnr.it

Abstract

The overall objective of the project is to provide European industry and manufacturing with urgently needed, trusted measurement capability and standards for 3D-resolved chemical composition and interfacial material properties.
"Faster", "smarter" and "cheaper" demands from consumers are driving innovation in high value-added manufacturing [1]. To achieve this, industry is increasingly using 3D architectures, additive manufacturing and a rapidly expanding library of materials. This is equally the case for devices based on organic materials, such as smart optical films and advanced coatings, as it is for inorganic nano-layered, high-density 3D-devices. In many technologies, e.g. sensors and semiconductors, the interface between organic and inorganic materials causes severe measurement issues. This creates an urgent need for beyond state-of-the-art capabilities to measure chemical composition and interfacial properties with 3D-spatial resolution.

Data inizio attività

01/01/2019

Parole chiave

metrology, surface analysis, SIMS

Ultimo aggiornamento: 02/01/2025